MFC-UT Series Gas mass flow controller

MFC-UT Series Mass Flow Controller (MFC) is a compact product developed based on industry’s advanced MEMS flow sensor chip, combined with high-speed sampling processing technology and digital compensation algorithm. The product is equipped with imported electromagnetic proportional valve, 316L stainless steel gas seat, and high precision MEMS flow chip, etc. The ultra-high integration reduces the size of the product by half, which can be better applied to installation places with strict space requirements.


Wide measuring rangesMicroHigh precision
Low pressure dropSmall sizeFast response

Technical Data

Model Number: /

Voltage: DC24V,corrugation ≤50mV

Precision: ±1%F.S

Operating temperature: 0~50℃

Flow range: 0~20SLM

Work pressure: 0~1MPa

Resolution: Lowest 0.01SCCM

Response time: ≤1S


Micro gas mass flowmeter--

Dateiformat P D F

Application Area

Recommend Products